VLSI fabrication principles : silicon and gallium arsenide / Sorab K. Ghandhi.

By: Ghandhi, Sorab Khushro, 1928-
Material type: TextTextPublisher: New York : Wiley, c1994Edition: 2nd edDescription: xxiv, 834 p. : ill. ; 25 cmISBN: 0471580058 (alk. paper)Subject(s): Integrated circuits -- Very large scale integration | Silicon | Gallium arsenideDDC classification: 621.38152 LOC classification: TK7874 | .G473 1994Online resources: Publisher description | Table of Contents
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621.38152 G.S.V 1994 (Browse shelf) Available 613

Includes bibliographical references and index.

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