Introduction to microelectronic fabrication / Richard C. Jaeger.

By: Jaeger, Richard C
Material type: TextTextSeries: Modular series on solid state devices (Upper Saddle River, N.J.): v. 5.Publisher: Upper Saddle River, N.J. : Prentice Hall, c2002Edition: 2nd edDescription: xiv, 316 p. : ill. ; 24 cmISBN: 0201444941Subject(s): Integrated circuits -- Very large scale integration -- Design and construction -- TextbooksDDC classification: 621.395 LOC classification: TK7874 | .J33 2002
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621.395 J.R.I 2002 (Browse shelf) Available 19866

Includes bibliographical references and index.

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