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MEMS and microsystems : design and manufacture / Tai-Ran Hsu.

By: Hsu, Tai-Ran
Material type: TextTextPublisher: Boston : McGraw-Hill, c2002Edition: 1st edDescription: xii, 436 p. : ill. ; 24 cmISBN: 0072393912 (alk. paper)Subject(s): Microelectronics | Microelectromechanical systems | Microelectronic packagingDDC classification: 621.381 LOC classification: TK7874 | .H794 2002Online resources: Publisher description | Table of contents
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621.381 H.T.M 2002 (Browse shelf) Available 2541

Includes bibliographical references (p. 427-431) and index.

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