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MEMS and microsystems : design and manufacture / Tai-Ran Hsu.

By: Material type: TextTextPublication details: Boston : McGraw-Hill, c2002.Edition: 1st edDescription: xii, 436 p. : ill. ; 24 cmISBN:
  • 0072393912 (alk. paper)
Subject(s): DDC classification:
  • 621.381 21
LOC classification:
  • TK7874 .H794 2002
Online resources:
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Holdings
Item type Current library Call number Status Date due Barcode
Books Books Centeral Library Second Floor - Engineering & Architecture 621.381 H.T.M 2002 (Browse shelf(Opens below)) Available 2541

Includes bibliographical references (p. 427-431) and index.

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