TY  - BOOK
AU  - Jaeger,Richard C.
TI  - Introduction to microelectronic fabrication
T2  - Modular series on solid state devices
SN  - 0201444941
AV  - TK7874 .J33 2002
U1  - 621.395 21
PY  - 2002///
CY  - Upper Saddle River, N.J.
PB  - Prentice Hall
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Design and construction
KW  - Textbooks
N1  - Includes bibliographical references and index
ER  -