Hsu, Tai-Ran.

MEMS and microsystems : design and manufacture / Tai-Ran Hsu. - 1st ed. - Boston : McGraw-Hill, c2002. - xii, 436 p. : ill. ; 24 cm.

Includes bibliographical references (p. 427-431) and index.

0072393912 (alk. paper)

2001044737


Microelectronics.
Microelectromechanical systems.
Microelectronic packaging.

TK7874 / .H794 2002

621.381