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1.
MEMS : fundamental technology and applications / edited by Vikas Choudhary, Krzysztof Iniewski. by Series: Devices, circuits, and systems
Edition: 1st ed
Material type: Text Text; Format: print ; Literary form: Not fiction
Copyright date: ©2013
Availability: Items available for loan: Centeral Library (1)Call number: 621.381 C.V.M 2013.

2.
MEMS and microsystems : design and manufacture / Tai-Ran Hsu. by
Edition: 1st ed.
Material type: Text Text; Format: print ; Literary form: Not fiction
Publication details: Boston : McGraw-Hill, c2002
Availability: Items available for loan: Centeral Library (1)Call number: 621.381 H.T.M 2002.

3.
MEMS/MOEMS packaging : concepts, designs, materials, and processes / Ken Gilleo. by Series: McGraw-Hill nanoscience and technology series
Edition: 1st ed.
Material type: Text Text; Format: print ; Literary form: Not fiction
Publication details: New York : McGraw-Hill, c2005
Availability: Items available for loan: Centeral Library (6)Call number: 621.381046 G.K.M 2005, ...

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