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Your search returned 3 results.

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1. MEMS : fundamental technology and applications / edited by Vikas Choudhary, Krzysztof Iniewski.

by Choudhary, Vikas.

Edition: 1st edMaterial type: Text Text; Format: print ; Literary form: Not fiction Copyright date: ©2013Availability: Items available for loan: [Call number: 621.381 C.V.M 2013] (1).

2. MEMS and microsystems : design and manufacture / Tai-Ran Hsu.

by Hsu, Tai-Ran.

Edition: 1st ed.Material type: Text Text; Format: print ; Literary form: Not fiction Publisher: Boston : McGraw-Hill, c2002Online access: Publisher description | Table of contents Availability: Items available for loan: [Call number: 621.381 H.T.M 2002] (1).

3. MEMS/MOEMS packaging : concepts, designs, materials, and processes / Ken Gilleo.

by Gilleo, Ken.

Edition: 1st ed.Material type: Text Text; Format: print ; Literary form: Not fiction Publisher: New York : McGraw-Hill, c2005Online access: Table of contents only | Contributor biographical information | Publisher description | Table of contents only Availability: Items available for loan: [Call number: 621.381046 G.K.M 2005] (6).