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	1.	MEMS and microsystems : design and manufacture / Tai-Ran Hsu. by Hsu, Tai-Ran Edition: 1st ed. Material type: Text; Format: print ; Literary form: Not fiction Publication details: Boston : McGraw-Hill, c2002 Online access: Publisher description Table of contents Availability: Items available for loan: Centeral Library (1)Call number: 621.381 H.T.M 2002. Place hold Add to cart (remove)
	2.	MEMS/MOEMS packaging : concepts, designs, materials, and processes / Ken Gilleo. by Gilleo, Ken Series: McGraw-Hill nanoscience and technology series Edition: 1st ed. Material type: Text; Format: print ; Literary form: Not fiction Publication details: New York : McGraw-Hill, c2005 Online access: Table of contents only Contributor biographical information Publisher description Table of contents only Availability: Items available for loan: Centeral Library (6)Call number: 621.381046 G.K.M 2005, ... Place hold Add to cart (remove)

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