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Introduction to microelectronic fabrication / Richard C. Jaeger.

By: Material type: TextTextSeries: Modular series on solid state devices (Upper Saddle River, N.J.) ; v. 5.Publication details: Upper Saddle River, N.J. : Prentice Hall, c2002.Edition: 2nd edDescription: xiv, 316 p. : ill. ; 24 cmISBN:
  • 0201444941
Subject(s): DDC classification:
  • 621.395 21
LOC classification:
  • TK7874 .J33 2002
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Item type Current library Call number Status Date due Barcode
Books Books Centeral Library Second Floor - Engineering & Architecture 621.395 J.R.I 2002 (Browse shelf(Opens below)) Available 19866

Includes bibliographical references and index.

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