000 01288cam a2200325 a 4500
999 _c10864
_d10864
001 3470762
005 20170424110021.0
008 931007s1994 nyua b 001 0 eng
010 _a 93040716
020 _a0471580058 (alk. paper)
040 _aDLC
_cDLC
_dDLC
050 0 0 _aTK7874
_b.G473 1994
082 0 0 _a621.38152
_220
100 1 _aGhandhi, Sorab Khushro,
_d1928-
245 1 0 _aVLSI fabrication principles :
_bsilicon and gallium arsenide /
_cSorab K. Ghandhi.
250 _a2nd ed.
260 _aNew York :
_bWiley,
_cc1994.
300 _axxiv, 834 p. :
_bill. ;
_c25 cm.
504 _aIncludes bibliographical references and index.
650 0 _aIntegrated circuits
_xVery large scale integration.
650 0 _aSilicon.
650 0 _aGallium arsenide.
740 0 _aVery large scale integration fabrication principles.
856 4 2 _3Publisher description
_uhttp://www.loc.gov/catdir/description/wiley037/93040716.html
856 4 _3Table of Contents
_uhttp://www.loc.gov/catdir/toc/onix05/93040716.html
906 _a7
_bcbc
_corignew
_d1
_eocip
_f19
_gy-gencatlg
942 _2ddc
_cBK